Lam rainbow 4520 manual6/12/2023 ![]() Proper scheduling and planning improved the time of productive maintenance from 25% to 35%. The results for optimum life of equipment, obtained after performing RCM, were quite high. This analysis was performed in Texas Instruments, UK. In the current research, various RCM analysis were performed on electrostatic chuck to ensure that shifting the maintenance technique to RCM would increase the revenue generation for the industry. Downtime data was collected due to various faults in critical equipment. Analyses were performed to observe the improvement in the system’s efficiency. This technique was helpful in reducing the failure modes of critical equipment. The most critical component of the system was found to be Electrostatic Chuck (ESC) used in etching process. In industries, RCM is employed to decide maintenance strategies using reliability data. The objective of the present study was to investigate the failure modes of critical systems in the manufacturing process of micro-chips by using Reliability Centered Maintenance (RCM) technique. ![]() Also, the plant equipment’s reliability is of vital importance in any production operation. Failure is a basic concept of any reliability analysis. ![]() Quality of any reliability analysis depends strongly on the analyst’s ability to identify all required functions.
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